Electronics
Key geometric feature detection of microelectronic components
Key geometric feature detection of microelectronic components
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Key geometric feature detection of microelectronic components

This standard specifies the method for measuring micrometer length using scanning electron microscopy, which is suitable for measuring lengths ranging from 0.5 to 10 pm. It is also suitable for measuring micrometer length using electron probe analyzers. 2. The following standards contain provisions that, through reference in this standard, constitute provisions of this standard. At the time of publication of the standard, all versions shown are valid. All standards will be revised, and parties using this standard should explore the possibility of using the latest version of the following standards. Verification regulation of JJG550-88 scanning electron microscope

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