Scope
This standard specifies the method for quantitative analysis of specific points or areas on a sample using an energy spectrometer installed on a scanning electron microscope (SEM) or electron probe (EPMA). Quantitative analysis refers to the use of mass fractions (percentages) to represent the content of elements. Proper identification of all elements in the sample is an essential component of quantitative analysis, therefore, this standard also includes this aspect. This standard provides multiple quantitative analysis methods using energy dispersive spectroscopy. It is suitable for quantitative analysis of elements with a mass fraction higher than 1% using reference materials or "standard free" procedures. This standard has a higher level of confidence in the analysis of elements with atomic numbers greater than 10 This standard also specifies the analysis method for light elements with atomic numbers less than 11 Note: When there are no overlapping peaks and the corresponding characteristic X-rays are strongly excited, the energy spectrometer can also measure elements with a mass fraction at the 0.1% level. This
standard is mainly applied to the quantitative analysis of surface flat specimens, and the basic methods are also applicable to the analysis of surface uneven specimens, but additional uncertainty components will be introduced There is currently no recognized accurate energy dispersive spectroscopy (EDS) quantitative analysis method for light elements. The following are several EDS methods commonly used for light element analysis:
a) Measure peak area and compare peak intensity. As stated in Appendix D, this method has a higher uncertainty in the analysis results of light elements compared to specific elements When a light element in a known sample is stoichiometric bound to a heavy element (Z> 10), the concentration of that light element can be determined by comparing it to the relevant concentration of other elements. This method is usually used for the determination of oxygen in silicate mineral samples
c) Calculate the concentration using the difference method, which subtracts the total percentage of elements that can be analyzed from 100% to obtain the percentage of light elements. This method can only be applied under good beam stability and the condition of measuring at least one reference sample separately, and it also requires precise determination of other elements in the sample
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